Microscope Objectives

MLOptic provides standard microscope objectives to fit existing systems as well as high-end customized objectives to provide higher levels of system performance.




  • Custom objectives are designed and manufactured according to your performance requirements
  • Objective performance is consistant and highly correlated over a large number of units
  • High performance achieved by our own Active Allignment Assembly technique.
  •       Utilizes real time, full FOV optical performance metrology
  • Objectives achieve high contrast and uniform resolution over the entire FOV
  • Complete optical calibration and associated imaging correction

M Plan Apo M Plan Apo L M Plan Apo HR M Plan Apo NIR M Plan Apo NIR L M Plan Apo NIR HR M Plan Apo NUV
High N.A Long working distance High resolution High resolution Long working distance Long working distance Long working distance
Flat field / Apo High N.A Flat field / Apo Flat field / Apo Hign N.A High resolution High N.A
VIS Flat field / Apo VIS VIS-NIR Flat field / Apo Flat field / Apo Flat field / Apo
  VIS     VIS-NIR VIS-NIR VIS-NUV

Metallurgical Objective: Used in semiconductor AOI detection.

Fluorescent Objective: Used in fluorescent biomedical detection.
 

Semiconductor Detection Microscope Objectives

M PLAN APO L 　 　 　 　 　 　 　
　 Mag. f'(mm) N.A. W.D.(mm) FOV(mm) PL(mm) Interface
MPlan APO L 2X 2X 100 0.056 ≥34 φ12.3
MPlan APO L 5X 5X 40 0.14 ≥34 φ5
MPlan APO L 10X 10X 20 0.28 ≥34 φ2.5
MPlan APO L 20X 20X 10 0.42 ≥14 φ1.2

 

M PLAN APO LH 　 　 　 　 　 　
　 Mag. f'(mm) N.A. W.D.(mm) FOV(mm) PL(mm) Interface
MPlan APO LH 5X 5X 40 0.225 >30 φ4.89 95 M26X36 TPI

 

Fluorescent Microscope Objective

F PLAN APO 　 　 　 　 　 　 　
　 Mag. f'(mm) N.A. W.D.(mm) OFN PL(mm) Interface
F Plan APO 20X Oil Immersion 20X 10 0.8 5.3 20 95 M30x0.75
F Plan APO 27X Oil Immersion 27X 7.5 0.6 3.75 27 39.5 M20.32×0.705
F Plan APO 10X 10X 20 0.35 1.96 40.6 45 M20.32×0.705
F Plan APO 20X 20X 9 0.45 5.65 20 45 M20.32×0.705
F Plan SAPO 20X 20X 9 0.75 0.6 26.5 45 M20.32×0.705